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MEMS VISCOSITY SENSOR USING DUAL SPIRAL SHAPED VIBRATING STRUCTURE Yasuyuki Yamamoto 1, Sohei Matsumoto , Hiroshi Yabuno 2, Masaharu Kuroda , Kenichi Fujii 1and Tomoko Yamamoto 1 National Institute of Advanced Industrial Science a nd Technology (AIST), JAPAN, 2 Keio University, JAPAN ABSTRACT We report a development of MEMS based viscosity sensor. Title Author user Created Date 12/17/ PM. >Þ>â>Ú>á >Þ>â >ß>ß >ß>ß >ß>â>Ú>ß >ß>â>Ú>à >ß>â>Ú>à >ß>ä>Ú>ß >ß>â>Ú>ä >Þ>â >ß>ä>Ú>ã >ß>ß >ß>Ü>Ú>á >ß>ä>Ú>à.
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